Invention Grant
US07901970B2 Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components
有权
基于微机电系统(MEMS)的电流和磁场传感器具有电容感测元件
- Patent Title: Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components
- Patent Title (中): 基于微机电系统(MEMS)的电流和磁场传感器具有电容感测元件
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Application No.: US11939589Application Date: 2007-11-14
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Publication No.: US07901970B2Publication Date: 2011-03-08
- Inventor: Anis Zribi , Glenn Scott Claydon , Christopher James Kapusta , Laura Jean Meyer , Ertugal Berkcan , Wei-Cheng Tian
- Applicant: Anis Zribi , Glenn Scott Claydon , Christopher James Kapusta , Laura Jean Meyer , Ertugal Berkcan , Wei-Cheng Tian
- Applicant Address: US NY Niskayuna
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Niskayuna
- Agent Richard D. Emery
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
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