Invention Grant
US07901986B2 Wiring substrate, manufacturing method thereof, and semiconductor device 有权
配线基板及其制造方法以及半导体装置

Wiring substrate, manufacturing method thereof, and semiconductor device
Abstract:
In a wiring substrate according to the present invention, a base wiring board is constructed by stacking a plurality of unit wiring boards each having wiring patterns which enable an electrical connection between upper and lower sides, in a state that the plurality of unit wiring boards are connected to each other via a connection terminal, and a silicon interposer is stacked on the base wiring board via a connection terminal, and a resin portion is filled in a gap between the plurality of unit wiring boards as well as a gap between the base wiring board and the silicon interposer, and a resin portion serves as a substrate which integrates the base wiring board and the silicon interposer.
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