Invention Grant
- Patent Title: MugFET with stub source and drain regions
- Patent Title (中): MugFET具有短路源极和漏极区域
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Application No.: US12132865Application Date: 2008-06-04
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Publication No.: US07902000B2Publication Date: 2011-03-08
- Inventor: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anthony J. Canale
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
The present invention provides a semiconductor device that includes at least one semiconductor Fin structure atop the surface of a substrate; the semiconducting fin structure including a channel of a first conductivity type and source/drain regions of a second conductivity type, the source/drain regions present at each end of the semiconductor fin structure; a gate structure immediately adjacent to the semiconductor fin structure, a dielectric spacer abutting each sidewall of the gate structure wherein the each end of the fin structure extends a dimension that is less than about ¼ a length of the Si-containing fin structure from a sidewall of the dielectric spacer; and a semiconductor region to the each end of the semiconductor fin structure, wherein the semiconductor region to the each end of the semiconductor fin structure is separated from the gate structure by the dielectric spacer.
Public/Granted literature
- US20090302402A1 MUGFET WITH STUB SOURCE AND DRAIN REGIONS Public/Granted day:2009-12-10
Information query
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