Invention Grant
- Patent Title: Methods and devices for a high-k stacked capacitor
- Patent Title (中): 高k堆叠电容器的方法和装置
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Application No.: US12029798Application Date: 2008-02-12
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Publication No.: US07902033B2Publication Date: 2011-03-08
- Inventor: Byron Lovell Williams , Maxwell Walthour Lippitt, III , Betty Mercer , Scott Montgomery , Binghua Hu
- Applicant: Byron Lovell Williams , Maxwell Walthour Lippitt, III , Betty Mercer , Scott Montgomery , Binghua Hu
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
An embodiment generally relates a method of forming capacitors. The method includes forming a plurality of holes within a protective overcoat or backend dielectric layer of an integrated circuit and depositing multiple layers of metal, each layer of metal electrically tied to an associated electrode. The method also includes alternately depositing multiple layers of dielectric between the multiple layers of metal and coupling a bottom layer of the multiple layers of metal to a contact node in a top metal layer of the integrated circuit.
Public/Granted literature
- US20090200637A1 METHODS AND DEVICES FOR A HIGH-K STACKED CAPACITOR Public/Granted day:2009-08-13
Information query
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