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US07902033B2 Methods and devices for a high-k stacked capacitor 有权
高k堆叠电容器的方法和装置

Methods and devices for a high-k stacked capacitor
Abstract:
An embodiment generally relates a method of forming capacitors. The method includes forming a plurality of holes within a protective overcoat or backend dielectric layer of an integrated circuit and depositing multiple layers of metal, each layer of metal electrically tied to an associated electrode. The method also includes alternately depositing multiple layers of dielectric between the multiple layers of metal and coupling a bottom layer of the multiple layers of metal to a contact node in a top metal layer of the integrated circuit.
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