Invention Grant
- Patent Title: Dual-sided substrate measurement apparatus and methods
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Application No.: US12286762Application Date: 2008-10-02
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Publication No.: US07902040B1Publication Date: 2011-03-08
- Inventor: Albert J. Crespin , Jim Woodruff , Ray Ellis , Scott Kulas , Joe Jamello , Emily True
- Applicant: Albert J. Crespin , Jim Woodruff , Ray Ellis , Scott Kulas , Joe Jamello , Emily True
- Applicant Address: US CA San Jose
- Assignee: Ultratech, Inc.
- Current Assignee: Ultratech, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Peters Verny, LLP
- Agent Allston L. Jones
- Main IPC: H01L21/30
- IPC: H01L21/30
Abstract:
An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.
Information query
IPC分类:
