Invention Grant
US07902070B2 Method and system for producing optically transparent noble metal films
有权
用于制造光学透明贵金属膜的方法和系统
- Patent Title: Method and system for producing optically transparent noble metal films
- Patent Title (中): 用于制造光学透明贵金属膜的方法和系统
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Application No.: US11415843Application Date: 2006-05-01
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Publication No.: US07902070B2Publication Date: 2011-03-08
- Inventor: Sabrina Conoci , Salvatore Petralia
- Applicant: Sabrina Conoci , Salvatore Petralia
- Applicant Address: IT Agrate Brianza (MI)
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza (MI)
- Agency: Graybeal Jackson LLP
- Agent Lisa K. Jorgenson; Paul F. Rusyn
- Priority: EP05009460 20050429
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/302
Abstract:
A method and system for producing a noble metal film includes the step of sputtering a noble metal on a substrate thus obtaining a film. The method and system further includes the step of subjecting the film to a thermal treatment, thus obtaining the noble metal film.
Public/Granted literature
- US20070042195A1 Method and system for producing optically transparent noble metal films Public/Granted day:2007-02-22
Information query
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