Invention Grant
- Patent Title: Phase-shifting element and particle beam device having a phase-shifting element
- Patent Title (中): 具有相移元件的相移元件和粒子束器件
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Application No.: US12070055Application Date: 2008-02-14
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Publication No.: US07902506B2Publication Date: 2011-03-08
- Inventor: Rasmus Schröder , Bastian Barton , Gerd Benner , Harald Rose
- Applicant: Rasmus Schröder , Bastian Barton , Gerd Benner , Harald Rose
- Applicant Address: DE Oberkochen DE Munich
- Assignee: Carl zeiss NTS GmbH,Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.
- Current Assignee: Carl zeiss NTS GmbH,Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.
- Current Assignee Address: DE Oberkochen DE Munich
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102007007923 20070214
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.
Public/Granted literature
- US20080296509A1 Phase-shifting element and particle beam device having a phase-shifting element Public/Granted day:2008-12-04
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