Invention Grant
US07902615B2 Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure
失效
用于接收和/或产生声信号的微机械结构，用于产生微机械结构的方法，以及使用微机械结构
- Patent Title: Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure
- Patent Title (中): 用于接收和/或产生声信号的微机械结构，用于产生微机械结构的方法，以及使用微机械结构
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Application No.: US12084477Application Date: 2006-11-14
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Publication No.: US07902615B2Publication Date: 2011-03-08
- Inventor: Roman Schlosser , Stefan Weiss , Frank Fischer , Christoph Schelling
- Applicant: Roman Schlosser , Stefan Weiss , Frank Fischer , Christoph Schelling
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005056759 20051129
- International Application: PCT/EP2006/068419 WO 20061114
- International Announcement: WO2007/062975 WO 20070607
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H04R19/00
Abstract:
A micromechanical structure and a method for producing a micromechanical structure are provided, the micromechanical structure being configured for receiving and/or generating acoustic signals in a medium at least partially surrounding the structure. The structure includes a first counterelement that has first openings and essentially forms a first side of the structure, a second counterelement that has second openings and essentially forms a second side of the structure, and an essentially closed diaphragm disposed between the first counterelement and the second counterelement.
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