Invention Grant
- Patent Title: Sensor
- Patent Title (中): 传感器
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Application No.: US12110369Application Date: 2008-04-28
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Publication No.: US07902843B2Publication Date: 2011-03-08
- Inventor: Yu-Jen Fang , Jen-Yi Chen , Kai-Hsiang Yen , Po-Hsun Sung
- Applicant: Yu-Jen Fang , Jen-Yi Chen , Kai-Hsiang Yen , Po-Hsun Sung
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW96141675A 20071105
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01L9/12

Abstract:
A sensor including a carrier having two channels, a capacitive sensing element disposed on the carrier, and a cover is provided. The capacitive sensing element has a membrane, and a first chamber is formed between the membrane and the carrier. The cover is disposed on the carrier for covering the capacitive sensing element. A second chamber is formed between the membrane and the cover. The first chamber and the second chamber are located at two sides of the membrane, and the channels are respectively communicated with the first chamber and the second chamber.
Public/Granted literature
- US20090115430A1 SENSOR Public/Granted day:2009-05-07
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