Invention Grant
US07903258B2 System and method for positioning a product using a laser interferometer 失效
使用激光干涉仪定位产品的系统和方法

  • Patent Title: System and method for positioning a product using a laser interferometer
  • Patent Title (中): 使用激光干涉仪定位产品的系统和方法
  • Application No.: US10597708
    Application Date: 2005-01-25
  • Publication No.: US07903258B2
    Publication Date: 2011-03-08
  • Inventor: Arjan Franklin Bakker
  • Applicant: Arjan Franklin Bakker
  • Applicant Address: NL Eindhoven
  • Assignee: Koninklijke Philips Electronics N.V.
  • Current Assignee: Koninklijke Philips Electronics N.V.
  • Current Assignee Address: NL Eindhoven
  • Agent Larry Liberchuk
  • Priority: EP04100515 20040211
  • International Application: PCT/IB2005/050288 WO 20050125
  • International Announcement: WO2005/078526 WO 20050825
  • Main IPC: G01B11/02
  • IPC: G01B11/02
System and method for positioning a product using a laser interferometer
Abstract:
A system for positioning a product, comprising a chuck for supporting the product, an intermediate stage supporting said chuck, and a stationary base supporting said intermediate stage. The chuck can move with respect to the intermediate stage in a first direction X, and the intermediate stage can move with respect to said stationary base in a second direction Y. The system furthermore comprises at least one laser interferometer for measuring the position of the chuck relative to the stationary base. The main part of the laser interferometer is attached to the intermediate stage, so that it can measure the distance between a reflector on the chuck and a reflector on the stationary base.
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