Invention Grant
US07903259B2 Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
有权
用于确定物体上的至少一个结构的位置的装置,使用具有该装置的照明装置和使用该装置的保护气体
- Patent Title: Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
- Patent Title (中): 用于确定物体上的至少一个结构的位置的装置,使用具有该装置的照明装置和使用该装置的保护气体
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Application No.: US12015437Application Date: 2008-01-16
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Publication No.: US07903259B2Publication Date: 2011-03-08
- Inventor: Michael Heiden
- Applicant: Michael Heiden
- Applicant Address: DE Weilburg
- Assignee: Vistec Semiconductor Systems GmbH
- Current Assignee: Vistec Semiconductor Systems GmbH
- Current Assignee Address: DE Weilburg
- Agency: Houston Eliseeva, LLP.
- Priority: DE102007007660 20070213; DE102007049133 20071011
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A device for determining the position of a structure (3) on an object (2) in relation to a coordinate system is disclosed. The object (2) is placed on a measuring table (20) which is movable in one plane (25a), wherein a block (25) defines the plane (25a). At least one optical arrangement (40, 50) is provided for transmitted light illumination and/or reflected light illumination. The optical arrangement (40, 50) comprises an illumination apparatus (41, 51) for reflected light illumination and/or transmitted light illumination and at least one first or second optical element (9a, 9b), wherein at least part of the at least one optical element (9a, 9b) extends into the space (110) between the block (25) and an optical system support (100). The block (25) and/or the optical system support (100) separates the illumination apparatus (41, 51) spatially from the plane (25a) in which the measuring table (20) is movable.
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