Invention Grant
- Patent Title: Polarization-modulating optical element and method for manufacturing thereof
- Patent Title (中): 极化调制光学元件及其制造方法
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Application No.: US11739232Application Date: 2007-04-24
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Publication No.: US07903333B2Publication Date: 2011-03-08
- Inventor: Daniel Kraehmer , Ralf Mueller
- Applicant: Daniel Kraehmer , Ralf Mueller
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006021334 20060505
- Main IPC: G02B5/30
- IPC: G02B5/30

Abstract:
The disclosure relates to a method of manufacturing a polarization-modulating optical element, wherein the element causes, for light passing through the element and due to stress-induced birefringence, a distribution of retardation between orthogonal states of polarization, the method comprising joining a first component and a second component, wherein a non-plane surface of the first component being provided with a defined height profile is joined with a plane surface of the second component, whereby a mechanical stress causing the stress-induced birefringence is produced in the such formed polarization-modulating optical element.
Public/Granted literature
- US20070211246A1 POLARIZATION-MODULATING OPTICAL ELEMENT AND METHOD FOR MANUFACTURING THEREOF Public/Granted day:2007-09-13
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