Invention Grant
- Patent Title: Optical metrological scale and laser-based manufacturing method therefor
- Patent Title (中): 光学计量尺度和激光制造方法
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Application No.: US11546024Application Date: 2006-10-11
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Publication No.: US07903336B2Publication Date: 2011-03-08
- Inventor: Kurt Pelsue , Stuart A. Dodson, II , Bradley L. Hunter , Donald V. Smart , Pierre-Yves Mabboux , Jonathan S. Ehrmann
- Applicant: Kurt Pelsue , Stuart A. Dodson, II , Bradley L. Hunter , Donald V. Smart , Pierre-Yves Mabboux , Jonathan S. Ehrmann
- Applicant Address: US MA Bedford
- Assignee: GSI Group Corporation
- Current Assignee: GSI Group Corporation
- Current Assignee Address: US MA Bedford
- Agency: BainwoodHuang
- Main IPC: G02B27/44
- IPC: G02B27/44 ; G02F1/295 ; H03M1/22 ; G01B11/02

Abstract:
A reflective metrological scale has a metal tape substrate and a scale pattern of elongated side-by-side marks surrounded by reflective surface areas of the substrate. Each mark has a furrowed cross section and may have a depth in the range of 0.5 to 2 microns. The central region of each mark may be rippled and darkened to provide an enhanced optical reflection ratio with respect to surrounding surface areas. A manufacturing method includes the repeated steps of (1) creating a scale mark by irradiating the substrate surface at a mark location with overlapped pulses from a laser, each pulse having an energy density of less than about 1 joule per cm2, and (2) changing the relative position of the laser and the substrate by a displacement amount defining a next mark location on the substrate at which a next mark of the scale is to be created.
Public/Granted literature
- US20070240325A1 Optical metrological scale and laser-based manufacturing method therefor Public/Granted day:2007-10-18
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