Invention Grant
- Patent Title: Intracavity harmonic generation using a recycled intermediate harmonic
- Patent Title (中): 使用回收中间谐波进行腔内谐波生成
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Application No.: US12413246Application Date: 2009-03-27
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Publication No.: US07903701B2Publication Date: 2011-03-08
- Inventor: Fuzheng Zhou , Haiwen Wang , Chung-Po Huang
- Applicant: Fuzheng Zhou , Jufen Hua, legal representative , Haiwen Wang , Chung-Po Huang
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Stoel Rives LLP
- Main IPC: H01S3/10
- IPC: H01S3/10

Abstract:
Lasers configured for intracavity harmonic generation of second and higher order harmonic laser beam energy include mode-matching optics, such as a curved mirror, for recycling an unused portion of an intermediate harmonic laser beam energy (e.g., second harmonic laser beam energy) to improve higher order harmonic laser beam energy generation efficiency (e.g., third or higher order harmonic laser beam energy generation efficiency) without sacrificing beam quality of the higher order harmonic laser beam energy. The curved mirror may be positioned out of a resonant laser cavity of the laser. A radius of curvature and a position of the curved mirror are selected so that a beam radius and a beam divergence of the recycled second harmonic laser beam energy are essentially the same as a beam radius and a beam divergence of incoming second harmonic laser beam energy everywhere along a beam path of the incoming second harmonic laser beam.
Public/Granted literature
- US20100246615A1 INTRACAVITY HARMONIC GENERATION USING A RECYCLED INTERMEDIATE HARMONIC Public/Granted day:2010-09-30
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