Invention Grant
- Patent Title: Flow verification system and flow verification method
- Patent Title (中): 流验证系统和流验证方法
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Application No.: US12219287Application Date: 2008-07-18
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Publication No.: US07904257B2Publication Date: 2011-03-08
- Inventor: Akiko Nakada , Kazutoshi Itoh , Akihito Sugino
- Applicant: Akiko Nakada , Kazutoshi Itoh , Akihito Sugino
- Applicant Address: JP Komaki-shi
- Assignee: CKD Corporation
- Current Assignee: CKD Corporation
- Current Assignee Address: JP Komaki-shi
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-222582 20070829
- Main IPC: G01F1/34
- IPC: G01F1/34

Abstract:
A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.
Public/Granted literature
- US20090063059A1 Flow verification system and flow verification method Public/Granted day:2009-03-05
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