Management of countermeasure of pollution particles deposited on an object to be processed is optimized based on a cause of the pollution. Data processing and management equipment 1 comprises a functional approximation part 2 to make a mathematical model of a relation between measured numbers of particles deposited on a substrate during processing in a surface structuring device or a film forming device and accumulated amount processed after cleaning up of the device by a functional equation based on a cause of the deposit of the particles. A judging part 3 specifies the cause of the deposit of particles by comparing the functional equation with the measured numbers of particles.