Invention Grant
US07904845B2 Determining locations on a wafer to be reviewed during defect review 有权
确定在缺陷审查期间待审查的晶圆上的位置

Determining locations on a wafer to be reviewed during defect review
Abstract:
Various methods, designs, defect review tools, and systems for determining locations on a wafer to be reviewed during defect review are provided. One computer-implemented method includes acquiring coordinates of defects detected by two or more inspection systems. The defects do not include defects detected on the wafer. The method also includes determining coordinates of the locations on the wafer to be reviewed during the defect review by translating the coordinates of the defects into the coordinates on the wafer such that results of the defect review performed at the locations can be used to determine if the defects cause systematic defects on the wafer.
Information query
Patent Agency Ranking
0/0