Invention Grant
US07904854B2 System and method for checking for sub-resolution assist features
有权
用于检查子分辨率辅助功能的系统和方法
- Patent Title: System and method for checking for sub-resolution assist features
- Patent Title (中): 用于检查子分辨率辅助功能的系统和方法
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Application No.: US11498834Application Date: 2006-08-04
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Publication No.: US07904854B2Publication Date: 2011-03-08
- Inventor: Sean C. O'Brien
- Applicant: Sean C. O'Brien
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
In accordance with the invention, there is provided a system and method for checking a mask layout including sub-resolution assist features (SRAFs). A checking program divides each edge of each main feature into sections, forms a set of segments by searching perpendicularly over a distance to determine if any portion of a feature is located within the distance. Segments are then flagged based on whether a feature located within proximity to that segment. A classification program may then classify each of the main features based on the segment data.
Public/Granted literature
- US20080034343A1 System and method for checking for sub-resolution assist features Public/Granted day:2008-02-07
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