Invention Grant
US07904854B2 System and method for checking for sub-resolution assist features 有权
用于检查子分辨率辅助功能的系统和方法

  • Patent Title: System and method for checking for sub-resolution assist features
  • Patent Title (中): 用于检查子分辨率辅助功能的系统和方法
  • Application No.: US11498834
    Application Date: 2006-08-04
  • Publication No.: US07904854B2
    Publication Date: 2011-03-08
  • Inventor: Sean C. O'Brien
  • Applicant: Sean C. O'Brien
  • Applicant Address: US TX Dallas
  • Assignee: Texas Instruments Incorporated
  • Current Assignee: Texas Instruments Incorporated
  • Current Assignee Address: US TX Dallas
  • Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
  • Main IPC: G06F17/50
  • IPC: G06F17/50
System and method for checking for sub-resolution assist features
Abstract:
In accordance with the invention, there is provided a system and method for checking a mask layout including sub-resolution assist features (SRAFs). A checking program divides each edge of each main feature into sections, forms a set of segments by searching perpendicularly over a distance to determine if any portion of a feature is located within the distance. Segments are then flagged based on whether a feature located within proximity to that segment. A classification program may then classify each of the main features based on the segment data.
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