Invention Grant
- Patent Title: Physical sensor and method of process
- Patent Title (中): 物理传感器和过程方法
-
Application No.: US12175347Application Date: 2008-07-17
-
Publication No.: US07905149B2Publication Date: 2011-03-15
- Inventor: Kengo Suzuki , Takeshi Harada , Yasuo Osone , Masahide Hayashi , Teruhisa Akashi
- Applicant: Kengo Suzuki , Takeshi Harada , Yasuo Osone , Masahide Hayashi , Teruhisa Akashi
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2007-189657 20070720
- Main IPC: G01B7/16
- IPC: G01B7/16

Abstract:
There is provided a physical sensor which ensures long-term reliability and can be miniaturized and increased in density, and a method of producing the same. A physical sensor includes a supporting substrate, an element substrate that includes a sensor element and is joined to the supporting substrate through an insulating layer, a glass cap that covers an area of the sensor element and is joined to the element substrate, and a built-in electrode that is electrically connected to the sensor element. The built-in electrode is formed in a through hole passing through the element substrate, the insulating layer and the supporting substrate. A portion of the glass cap that covers an area of the built-in electrode is anodically bonded to the element substrate.
Public/Granted literature
- US20090020419A1 Physical Sensor And Method Of Process Public/Granted day:2009-01-22
Information query