Invention Grant
US07906094B2 Method for producing a high purity trisilane product from the pyrolysis of disilane
有权
从乙硅烷的热解生产高纯度丙硅烷产品的方法
- Patent Title: Method for producing a high purity trisilane product from the pyrolysis of disilane
- Patent Title (中): 从乙硅烷的热解生产高纯度丙硅烷产品的方法
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Application No.: US11863524Application Date: 2007-09-28
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Publication No.: US07906094B2Publication Date: 2011-03-15
- Inventor: Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell, Jr. , Derong Zhou , Thomas K. Moncur
- Applicant: Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell, Jr. , Derong Zhou , Thomas K. Moncur
- Applicant Address: FR Paris US CA Fremont US TX Houston
- Assignee: L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude,American Air Liquide, Inc.,Air Liquide Electronics U.S. LP
- Current Assignee: L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude,American Air Liquide, Inc.,Air Liquide Electronics U.S. LP
- Current Assignee Address: FR Paris US CA Fremont US TX Houston
- Agent Patricia E. McQueeney
- Main IPC: C01B33/04
- IPC: C01B33/04
Abstract:
Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.
Public/Granted literature
- US20080175784A1 METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE Public/Granted day:2008-07-24
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