Invention Grant
US07906170B2 Apparatus, method, and system capable of producing a moveable magnetic field 有权
能够产生可移动磁场的装置,方法和系统

Apparatus, method, and system capable of producing a moveable magnetic field
Abstract:
An apparatus capable of producing a moveable magnetic field includes a moveable support structure (110) and a magnetic field source (120) supported by the moveable support structure, where the magnetic field source is in a fixed position relative to the moveable support structure. The magnetic field source generates a magnetic field at a wafer surface of at least approximately 50 Oersted, and the magnetic field is aligned so as to produce magnetic anisotropy in a plane of the moveable support structure.
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