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US07906171B2 Method for production of a layer having nanoparticles, on a substrate 有权
在衬底上制备具有纳米颗粒的层的方法

Method for production of a layer having nanoparticles, on a substrate
Abstract:
The invention relates to a method for producing a layer (110) having nanoparticles (40), on a substrate (100). The invention is based on the object of specifying a method for producing a layer containing nanoparticles, which method can be carried out particularly easily and nevertheless offers a very wide degree of freedom for the configuration and the composition of the layer to be produced. According to the invention, this object is achieved in that nanoparticles (40) are released and a nanoparticle stream (50) is produced in a first process chamber (10), the nanoparticle stream (50) is passed into a second process chamber (80), and the nanoparticles (40) are deposited on the substrate (100) in the second process chamber (80).
Abstract(Chinese):

本发明涉及在衬底（100）上制备具有纳米颗粒（40）的层（110）的方法。 本发明是基于指定用于制造含有纳米颗粒的层的方法的目的，该方法可以特别容易地进行，并且对于要生产的层的构造和组成提供非常宽的自由度。 根据本发明，该目的是通过释放纳米颗粒（40）并在第一处理室（10）中产生纳米颗粒流（50），纳米颗粒流（50）进入第二处理室（80） ），并且纳米颗粒（40）沉积在第二处理室（80）中的基板（100）上。

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