Invention Grant
- Patent Title: Positive-type resist composition
- Patent Title (中): 正型抗蚀剂组合物
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Application No.: US12200393Application Date: 2008-08-28
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Publication No.: US07906269B2Publication Date: 2011-03-15
- Inventor: Yoshimi Isono , Jonathan Joachim Jodry , Satoru Narizuka , Kazuhiro Yamanaka
- Applicant: Yoshimi Isono , Jonathan Joachim Jodry , Satoru Narizuka , Kazuhiro Yamanaka
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2007-223744 20070830
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30 ; G03F7/38 ; C08F214/18

Abstract:
Disclosed is a fluorine-containing polymer compound containing first and second repeating units respectively represented by formulas (a-1) and (a-2), wherein R3 represents a fluorine atom or fluorine-containing alkyl group, each of W and W1 independently represents a bivalent linking group, R2 represents an acid-labile protecting group, each of R4, R5 and R6 independently represents a hydrogen atom, fluorine atom or monovalent organic group, and at least two of R4, R5, R6 and W or W1 may be combined to form a cyclic structure in formula (a-1) or (a-2). This polymer compound has a weight-average molecular weight of 1,000 to 1,000,000 and can provide a resist composition capable of forming a pattern with no swelling and no pattern falling down.
Public/Granted literature
- US20090061353A1 Positive-Type Resist Composition Public/Granted day:2009-03-05
Information query
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