Invention Grant
US07906358B2 Epitaxial growth of cubic crystalline semiconductor alloys on basal plane of trigonal or hexagonal crystal
有权
立方晶体半导体合金在三角晶体或六方晶体的基面上的外延生长
- Patent Title: Epitaxial growth of cubic crystalline semiconductor alloys on basal plane of trigonal or hexagonal crystal
- Patent Title (中): 立方晶体半导体合金在三角晶体或六方晶体的基面上的外延生长
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Application No.: US12254017Application Date: 2008-10-20
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Publication No.: US07906358B2Publication Date: 2011-03-15
- Inventor: Yeonjoon Park , Sang H. Choi , Glen C. King
- Applicant: Yeonjoon Park , Sang H. Choi , Glen C. King
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
- Current Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
- Current Assignee Address: US DC Washington
- Agent Thomas K. McBride; Robin W. Edwards
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/22 ; H01L29/20 ; H01L21/02

Abstract:
Hetero-epitaxial semiconductor materials comprising cubic crystalline semiconductor alloys grown on the basal plane of trigonal and hexagonal substrates, in which misfit dislocations are reduced by approximate lattice matching of the cubic crystal structure to underlying trigonal or hexagonal substrate structure, enabling the development of alloyed semiconductor layers of greater thickness, resulting in a new class of semiconductor materials and corresponding devices, including improved hetero-bipolar and high-electron mobility transistors, and high-mobility thermoelectric devices.
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