Invention Grant
- Patent Title: Assembling two substrates by molecular adhesion
- Patent Title (中): 通过分子粘附装配两个底物
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Application No.: US11630283Application Date: 2005-06-29
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Publication No.: US07906362B2Publication Date: 2011-03-15
- Inventor: Guy Feuillet , Hubert Moriceau , Stephane Pocas , Eric Jalaguier , Norbert Moussy
- Applicant: Guy Feuillet , Hubert Moriceau , Stephane Pocas , Eric Jalaguier , Norbert Moussy
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0451374 20040630
- International Application: PCT/FR2005/050522 WO 20050629
- International Announcement: WO2006/008411 WO 20060126
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30 ; H01L21/46 ; H01L21/31 ; H01L21/469

Abstract:
An assembly method to enable local electrical bonds between zones located on a face of a first substrate and corresponding zones located on a face of a second substrate, the faces being located facing each other, at least one of the substrates having a surface topography. The method forms an intermediate layer including at least one burial layer on the face of the substrate or substrates having a surface topography to make it (them) compatible with molecular bonding of the faces of substrates to each other from a topographic point of view, resistivity and/or thickness of the intermediate layer being chosen to enable the local electrical bonds, brings the two faces into contact, the substrates positioned to create electrical bonds between areas on the first substrate and corresponding areas on the second substrate, and bonds the faces by molecular bonding.
Public/Granted literature
- US20080296712A1 Assembling Two Substrates by Molecular Adhesion Public/Granted day:2008-12-04
Information query
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