Invention Grant
- Patent Title: Phase change memory with tapered heater
- Patent Title (中): 带锥形加热器的相变存储器
-
Application No.: US11771501Application Date: 2007-06-29
-
Publication No.: US07906368B2Publication Date: 2011-03-15
- Inventor: Matthew Breitwisch , Thomas Happ , Eric A. Joseph , Hsiang-Lan Lung , Jan Boris Philipp
- Applicant: Matthew Breitwisch , Thomas Happ , Eric A. Joseph , Hsiang-Lan Lung , Jan Boris Philipp
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/06
- IPC: H01L21/06

Abstract:
An embodiment of the present invention includes a method of forming a nonvolatile phase change memory (PCM) cell. This method includes forming at least one bottom electrode; forming at least one phase change material layer on at least a portion of an upper surface of the bottom electrode; forming at least one heater layer on at least a portion of an upper surface of the phase change material layer; and shaping the heater layer into a tapered shape, such that an upper surface of the heater layer has a cross-sectional width that is longer than a cross-sectional width of a bottom surface of the heater layer contacting the phase change material layer.
Public/Granted literature
- US20090001341A1 Phase Change Memory with Tapered Heater Public/Granted day:2009-01-01
Information query
IPC分类: