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US07906397B2 Methods of fabricating nonvolatile semiconductor memory devices including a plurality of stripes having impurity layers therein 有权
制造包括其中具有杂质层的多个条纹的非易失性半导体存储器件的方法

Methods of fabricating nonvolatile semiconductor memory devices including a plurality of stripes having impurity layers therein
Abstract:
A nonvolatile semiconductor memory device includes a plurality of pillars protruding upward from a semiconductor substrate and having respective top surfaces and opposing sidewalls, a bit line on the top surfaces of the pillars and connecting a row of the pillars along a first direction, a pair of word lines on the opposing sidewalls of one of the plurality of pillars and crossing beneath the bit line, and a pair of memory layers interposed between respective ones of the pair of word lines and the one of the plurality of pillars. Methods of fabricating a nonvolatile semiconductor memory device include selectively etching a semiconductor substrate to form pluralities of stripes having opposing sidewalls and being arranged along a direction, forming memory layers and word lines along the sidewalls of the stripes selectively etching the stripes to form a plurality of pillars, and forming a bit line connecting the pillars and crossing above the word lines.
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