Invention Grant
US07906814B2 Fin field effect transistor having low leakage current and method of manufacturing the FinFET 有权
具有低漏电流的Fin场效应晶体管和制造FinFET的方法

  • Patent Title: Fin field effect transistor having low leakage current and method of manufacturing the FinFET
  • Patent Title (中): 具有低漏电流的Fin场效应晶体管和制造FinFET的方法
  • Application No.: US12310532
    Application Date: 2007-08-27
  • Publication No.: US07906814B2
    Publication Date: 2011-03-15
  • Inventor: Jong Ho Lee
  • Applicant: Jong Ho Lee
  • Applicant Address: KR Seoul
  • Assignee: SNU R&DB Foundation
  • Current Assignee: SNU R&DB Foundation
  • Current Assignee Address: KR Seoul
  • Agency: The Nath Law Group
  • Agent Jerald L. Meyer; Jiaxiao Zhang
  • Priority: KR10-2006-0084370 20060901
  • International Application: PCT/KR2007/004111 WO 20070827
  • International Announcement: WO2008/026859 WO 20080306
  • Main IPC: H01L29/76
  • IPC: H01L29/76
Fin field effect transistor having low leakage current and method of manufacturing the FinFET
Abstract:
Provided is a fin field effect transistor (FinFET) having low leakage current and a method of manufacturing the same. The FinFET includes: a bulk silicon substrate; a fence-shaped body formed by patterning the substrate; an insulating layer formed on a surface of the substrate to a first height of the fence-shaped body; a gate insulating layer formed at side walls and an upper surface of the fence-shaped body at which the insulating layer is not formed; a gate electrode formed on the gate insulating layer; source/drain formed at regions of the fence-shaped body where the gate electrode is not formed. The gate electrode includes first and second gate electrodes which are in contact with each other and have different work functions. Particularly, the second gate electrode having a low work function is disposed to be close to the drain. As a result, the FinFET according to the present invention increases a threshold voltage by using a material having the high work function for the gate electrode and lowers the work function of the gate electrode overlapping with the drain, so that gate induced drain leakage (GIDL) can be reduced.
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