Invention Grant
US07907289B2 Substrate measuring stage 有权
基板测量台

Substrate measuring stage
Abstract:
A substrate measuring stage used for a curve measuring system measuring a curve of the substrate and an ordinary measuring system measuring each of or one of a physical quantity and a chemical quantity of the substrate other than the curve, may include the mounting board movable between an ordinary measurement position for the ordinary measuring system and a retreat position away from and downward of the ordinary measurement position; the plurality of support pins insertable into through-holes provided in the mounting board and fixed to a curve measurement position for the curve measuring system; and a drive mechanism vertically moving the mounting board between the ordinary measurement position and the retreat position. The curve measurement position is set between the ordinary measurement position and the retreat position.
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