Invention Grant
- Patent Title: Integrated narrow bandpass filter array and a method for fabrication thereof
- Patent Title (中): 集成窄带通滤波器阵列及其制造方法
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Application No.: US11924640Application Date: 2007-10-26
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Publication No.: US07907340B2Publication Date: 2011-03-15
- Inventor: Shaowei Wang , Wei Lu , Xiaoshuang Chen , Ning Li , Bo Zhang , Zhifeng Li , Pingping Chen
- Applicant: Shaowei Wang , Wei Lu , Xiaoshuang Chen , Ning Li , Bo Zhang , Zhifeng Li , Pingping Chen
- Applicant Address: CN Shanghai
- Assignee: Shanghai Institute of Technical Physics, Chinese Academy of Sciences
- Current Assignee: Shanghai Institute of Technical Physics, Chinese Academy of Sciences
- Current Assignee Address: CN Shanghai
- Agency: Matthias Scholl P.C.
- Agent Matthias Scholl
- Priority: CN200510025460 20050427
- Main IPC: G02B1/10
- IPC: G02B1/10

Abstract:
Taught herein is an integragted narrow bandpass filter array and a method of its fabrication. The filter array is a Fabry-Perot type of filter array, wherein the pass band changes with the thickness of the spacer layer. The integrated filter array comprises a substrate, a lower mirror stack, a spacer array, and an upper mirror stack. The spacer array is an array of varied thicknesses formed using a combinatorial deposition technique. The spacer array is used to control the pass band of each mini-size narrow bandpass filter and realizes the integration of narrow bandpass filters with different pass bands on a single substrate. The merit of this technique lies in its fabrication efficiency and finished product rate which are much higher than for conventional methods. The filter array is completely matched with detector arrays and functional in most of the important optical ranges.
Public/Granted literature
- US20080042782A1 INTEGRATED NARROW BANDPASS FILTER ARRAY AND A METHOD FOR FABRICATION THEREOF Public/Granted day:2008-02-21
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