Invention Grant
- Patent Title: Optical composite material and method for its production
- Patent Title (中): 光复合材料及其生产方法
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Application No.: US11816981Application Date: 2006-02-22
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Publication No.: US07907347B2Publication Date: 2011-03-15
- Inventor: Eric Eva , Wilfried Clauss
- Applicant: Eric Eva , Wilfried Clauss
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- International Application: PCT/EP2006/001621 WO 20060222
- International Announcement: WO2006/089738 WO 20060831
- Main IPC: G02B3/00
- IPC: G02B3/00 ; G02B21/02 ; C03C1/00 ; C03C14/00 ; C03C10/14 ; B32B17/06 ; B32B15/00

Abstract:
An optical composite material comprises an amorphous optical material (6) with a first refractive index (na), into which crystalline nanoparticles (7) having a second, higher refractive index (nn) are embedded, wherein the amorphous material (6) and the nanoparticles (7) are resistant to UV radiation. A microlithography projection exposure apparatus comprises a projection objective (2) with at least one optical element (3) which is, in particular, operated in transmission and consists of an optical composite material of this type. In a method for producing the optical composite material, crystalline nanoparticles are introduced into the amorphous optical material during flame deposition in a soot or direct process.
Public/Granted literature
- US20090036289A1 Optical composite material and method for its production Public/Granted day:2009-02-05
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