Invention Grant
- Patent Title: Holding apparatus and exposure apparatus
- Patent Title (中): 保持装置和曝光装置
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Application No.: US12550021Application Date: 2009-08-28
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Publication No.: US07907358B2Publication Date: 2011-03-15
- Inventor: Naoki Murasato
- Applicant: Naoki Murasato
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2008-227612 20080904
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G02B15/14

Abstract:
A holding apparatus includes a holding member configured to hold an optical element, the holding member having an internal space that extends in a circumferential direction and has different sectional shapes perpendicular to the circumferential direction on at least two locations, a fixing member arranged outside of the holding member and configured to fix the holding member from an outside of the holding member, and a pressing member configured to press the internal space by supplying a fluid to the internal space, and to deform the holding member.
Public/Granted literature
- US20100053783A1 HOLDING APPARATUS AND EXPOSURE APPARATUS Public/Granted day:2010-03-04
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |