Invention Grant
US07907358B2 Holding apparatus and exposure apparatus 失效
保持装置和曝光装置

Holding apparatus and exposure apparatus
Abstract:
A holding apparatus includes a holding member configured to hold an optical element, the holding member having an internal space that extends in a circumferential direction and has different sectional shapes perpendicular to the circumferential direction on at least two locations, a fixing member arranged outside of the holding member and configured to fix the holding member from an outside of the holding member, and a pressing member configured to press the internal space by supplying a fluid to the internal space, and to deform the holding member.
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