Invention Grant
- Patent Title: Scalable quantum well device and method for manufacturing the same
- Patent Title (中): 可扩展量子阱器件及其制造方法
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Application No.: US12463338Application Date: 2009-05-08
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Publication No.: US07915608B2Publication Date: 2011-03-29
- Inventor: Geert Hellings , Geert Eneman , Marc Meuris
- Applicant: Geert Hellings , Geert Eneman , Marc Meuris
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC,Katholieke Universiteit Leuven
- Current Assignee: IMEC,Katholieke Universiteit Leuven
- Current Assignee Address: BE Leuven BE Leuven
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: EP08168648 20081107
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
A quantum well device and a method for manufacturing the same are disclosed. In one aspect, the device includes a quantum well region overlying a substrate, a gate region overlying a portion of the quantum well region, a source and drain region adjacent to the gate region. The quantum well region includes a buffer structure overlying the substrate and including semiconductor material having a first band gap, a channel structure overlying the buffer structure including a semiconductor material having a second band gap, and a barrier layer overlying the channel structure and including an un-doped semiconductor material having a third band gap. The first and third band gap are wider than the second band gap. Each of the source and drain region is self-aligned to the gate region and includes a semiconductor material having a doped region and a fourth band gap wider than the second band gap.
Public/Granted literature
- US20090283756A1 SCALABLE QUANTUM WELL DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-11-19
Information query
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