Invention Grant
US07915794B2 Piezoelectric device having a tension stress, and angular velocity sensor
有权
具有张力应力的压电元件和角速度传感器
- Patent Title: Piezoelectric device having a tension stress, and angular velocity sensor
- Patent Title (中): 具有张力应力的压电元件和角速度传感器
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Application No.: US12252886Application Date: 2008-10-16
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Publication No.: US07915794B2Publication Date: 2011-03-29
- Inventor: Nobuyuki Koike , Takashi Tamura
- Applicant: Nobuyuki Koike , Takashi Tamura
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: K&L Gates LLP
- Priority: JP2007-297321 20071115; JP2007-297323 20071115; JP2007-297325 20071115
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H03H9/21
Abstract:
A piezoelectric device includes a piezoelectric film and an electrode film. The piezoelectric film is constituted of lead zirconium titanate represented by Pb1+X(ZrYTi1−Y)O3+X, where X is 0 or more and 0.3 or less and Y is 0 or more and 0.55 or less, the piezoelectric film having a tension stress. The electrode film applies a voltage to the piezoelectric film.
Public/Granted literature
- US20090127981A1 PIEZOELECTRIC DEVICE, ANGULAR VELOCITY SENSOR, AND METHOD OF MANUFACTURING A PIEZOELECTRIC DEVICE Public/Granted day:2009-05-21
Information query
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