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US07916304B2 Systems and methods for 3-dimensional interferometric microscopy 有权
三维干涉显微镜的系统和方法

Systems and methods for 3-dimensional interferometric microscopy
Abstract:
In one embodiment, an apparatus comprises an optical system with multiple detectors and a processor. The optical system is configured to produce images of an optical source in a first dimension and a second dimension substantially orthogonal to the first dimension at each detector at a given time. Each image from the images is based on an interference of an emission from the optical source in a first direction and an emission from the optical source in a second direction different from the first direction. The processor is configured to calculate a position in a third dimension based on the images. The third dimension is substantially orthogonal to the first dimension and the second dimension.
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