Invention Grant
- Patent Title: Container transport system and measurement container
- Patent Title (中): 集装箱运输系统和测量容器
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Application No.: US11962719Application Date: 2007-12-21
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Publication No.: US07918122B2Publication Date: 2011-04-05
- Inventor: Masanao Murata , Susumu Maetaki
- Applicant: Masanao Murata , Susumu Maetaki
- Applicant Address: JP Kyoto
- Assignee: Muratec Automation Co., Ltd.
- Current Assignee: Muratec Automation Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Young & Thompson
- Priority: JP2006-345409 20061222
- Main IPC: G01F1/00
- IPC: G01F1/00 ; G01F1/34

Abstract:
A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.
Public/Granted literature
- US20080156069A1 CONTAINER TRANSPORT SYSTEM AND MEASUREMENT CONTAINER Public/Granted day:2008-07-03
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