Invention Grant
- Patent Title: Micromechanical sensor element
- Patent Title (中): 微机械传感器元件
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Application No.: US12158425Application Date: 2006-11-21
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Publication No.: US07918136B2Publication Date: 2011-04-05
- Inventor: Joerg Muchow , Hubert Benzel , Simon Armbruster , Christoph Schelling
- Applicant: Joerg Muchow , Hubert Benzel , Simon Armbruster , Christoph Schelling
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005061413 20051222; DE102006002114 20060117
- International Application: PCT/EP2006/068711 WO 20061121
- International Announcement: WO2007/073994 WO 20070705
- Main IPC: G01L9/06
- IPC: G01L9/06

Abstract:
A micromechanical sensor element (1) is provided, which has a sealed diaphragm (2) affixed in a frame (3), exhibits high sensitivity at high overload resistance and has a small size, and which allows a piezoresistive measured-value acquisition. To this end, at least one carrier element (4), which is connected to the frame (3) via at least one connection link (5), is formed in the region of the diaphragm (2). Furthermore, piezoresistors (6) for detecting a deformation are situated in the region of the connection link (5).
Public/Granted literature
- US20090084182A1 MICROMECHANICAL SENSOR ELEMENT Public/Granted day:2009-04-02
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