Invention Grant
- Patent Title: Method for temperature compensation of a piezoresistive gaged metal diaphragm
- Patent Title (中): 压阻式金属膜片的温度补偿方法
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Application No.: US12322817Application Date: 2009-02-06
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Publication No.: US07918137B2Publication Date: 2011-04-05
- Inventor: Anthony D. Kurtz , Joseph Van DeWeert , Boaz Kochman
- Applicant: Anthony D. Kurtz , Joseph Van DeWeert , Boaz Kochman
- Applicant Address: US NJ Leonia
- Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee: Kulite Semiconductor Products, Inc.
- Current Assignee Address: US NJ Leonia
- Agency: Troutman Sanders LLP
- Agent James E. Schutz, Esq.; Dean Y. Shahriari
- Main IPC: G01L9/06
- IPC: G01L9/06

Abstract:
There is described a temperature compensation scheme for a pressure sensitive metal diaphragm transducer. The transducer employs a Wheatstone bridge fabricated from p-type piezoresistors. The Wheatstone bridge is glassed directly onto the metal diaphragm. As the temperature of operation increases, the diaphragm exhibits a temperature variation of the Modulus of Elasticity. The Modulus of the metal diaphragm decreases with increasing temperature. Because of this, the same pressure applied to the metal diaphragm causes it to deflect further, which in turns causes increased strain applied to the bridge. Because of this effect, the sensitivity of the transducer increases with increasing temperature. A resistor is now placed in series with the Wheatstone bridge. The resistor is in series with the biasing voltage and because the TCS of the diaphragm is of an opposite sign, the series resistor has an even higher TCR in series with the bridge. In this manner, the bridge voltage is made to decrease with increasing temperature. Due to the fact that the bridge voltage decreases with increasing temperature the change in voltage compensates for the change in the Modulus of the metal diaphragm and therefore provides an accurate output at all temperatures.
Public/Granted literature
- US20100199775A1 Method for temperature compensation of a piezoresistive gaged metal diaphragm Public/Granted day:2010-08-12
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