Invention Grant
US07918138B2 Wireless microelectromechanical systems (MEMS) pressure sensor with built-in calibration
有权
无线微机电系统（MEMS）压力传感器内置校准
- Patent Title: Wireless microelectromechanical systems (MEMS) pressure sensor with built-in calibration
- Patent Title (中): 无线微机电系统（MEMS）压力传感器内置校准
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Application No.: US12369444Application Date: 2009-02-11
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Publication No.: US07918138B2Publication Date: 2011-04-05
- Inventor: Qing Jiang , Harold Glick
- Applicant: Qing Jiang , Harold Glick
- Applicant Address: US CA Oakland US DC Washington
- Assignee: Regents of the University of California,The United States of America as represented by the Secretary of the Navy
- Current Assignee: Regents of the University of California,The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: US CA Oakland US DC Washington
- Agency: Cotman IP Law Group, PLC
- Main IPC: G01L9/00
- IPC: G01L9/00
Abstract:
A wireless microelectromechanical system (MEMS) pressure sensor with built in calibration. An actuator is coupled with a pressure sensing device to enable the pressure to be calibrated against the known pressure exerted by the actuator. The sensing component is configured to flex under the application of force to a pure bending condition, i.e., the sensing component flexes with no or insignificant shear forces in the sensing component.
Public/Granted literature
- US20090266180A1 WIRELESS MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR WITH BUILT-IN CALIBRATION Public/Granted day:2009-10-29
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