Invention Grant
- Patent Title: Pirani vacuum gauge
- Patent Title (中): 皮拉尼真空计
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Application No.: US12700068Application Date: 2010-02-04
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Publication No.: US07918139B2Publication Date: 2011-04-05
- Inventor: Yohsuke Kawasaki
- Applicant: Yohsuke Kawasaki
- Applicant Address: JP Kawasaki-shi
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-238040 20070913
- Main IPC: G01L21/12
- IPC: G01L21/12 ; G01L21/30 ; G01L7/00

Abstract:
A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore.
Public/Granted literature
- US20100132475A1 PIRANI VACUUM GAUGE Public/Granted day:2010-06-03
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