Invention Grant
- Patent Title: Flow controller and its regulation method
- Patent Title (中): 流量控制器及其调节方法
-
Application No.: US10569783Application Date: 2005-06-20
-
Publication No.: US07918238B2Publication Date: 2011-04-05
- Inventor: Makoto Tanaka , Shigehiro Suzuki
- Applicant: Makoto Tanaka , Shigehiro Suzuki
- Applicant Address: JP Tokyo
- Assignee: Hitachi Metals, Ltd.
- Current Assignee: Hitachi Metals, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Beyer Law Group LLP
- Priority: JP2004-182362 20040621; JP2005-153314 20050526
- International Application: PCT/JP2005/011684 WO 20050620
- International Announcement: WO2005/124492 WO 20051229
- Main IPC: F16K31/02
- IPC: F16K31/02

Abstract:
A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal.
Public/Granted literature
- US20060278276A1 Flow controller and its regulation method Public/Granted day:2006-12-14
Information query