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US07918329B2 Conveying device using electrostatic adsorbing plate 失效
输送装置采用静电吸附板

Conveying device using electrostatic adsorbing plate
Abstract:
Provided is a low-cost electrostatic attraction transfer apparatus which can perform high-speed transfer, stabilizes a contact status of an electrostatic attraction board with a film and the like and does not generate fine defects on an object to be transferred.
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