Invention Grant
- Patent Title: Liquid jet head and an actuator apparatus
- Patent Title (中): 液体喷头和致动器装置
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Application No.: US12433213Application Date: 2009-04-30
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Publication No.: US07918543B2Publication Date: 2011-04-05
- Inventor: Hironobu Kazama , Yuka Yonekura , Koji Sumi
- Applicant: Hironobu Kazama , Yuka Yonekura , Koji Sumi
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2008-118898 20080430; JP2009-110582 20090430
- Main IPC: B41J2/045
- IPC: B41J2/045

Abstract:
A liquid jet head includes a flow passage forming substrate formed of a crystal substrate provided with a pressure generating chamber communicating with nozzle openings, and a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode, which are provided on the flow passage forming substrate to change pressure in the pressure generating chamber. The piezoelectric layer has a thickness of 5 μm or less and is formed of perovskite type crystals, and the distance between a diffraction peak position A of an X-ray derived from a surface (220) of the flow passage forming substrate and a diffraction peak position B of an X-ray derived from a surface (100) of the piezoelectric layer is within the range of 2θ=25.487±0.1°.
Public/Granted literature
- US20090273654A1 LIQUID JET HEAD AND AN ACTUATOR APPARATUS Public/Granted day:2009-11-05
Information query
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