Invention Grant
US07918640B2 Position correcting apparatus, vacuum processing equipment and position correcting method 有权
位置校正装置,真空处理设备和位置校正方法

  • Patent Title: Position correcting apparatus, vacuum processing equipment and position correcting method
  • Patent Title (中): 位置校正装置,真空处理设备和位置校正方法
  • Application No.: US12003318
    Application Date: 2007-12-21
  • Publication No.: US07918640B2
    Publication Date: 2011-04-05
  • Inventor: Yoshinori Fujii
  • Applicant: Yoshinori Fujii
  • Applicant Address: JP Chigasaki-shi
  • Assignee: Ulvac, Inc.
  • Current Assignee: Ulvac, Inc.
  • Current Assignee Address: JP Chigasaki-shi
  • Agency: Kratz, Quintos & Hanson, LLP
  • Priority: JP2005-185488 20050624
  • Main IPC: B65G47/24
  • IPC: B65G47/24
Position correcting apparatus, vacuum processing equipment and position correcting method
Abstract:
A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.
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