Invention Grant
- Patent Title: Position correcting apparatus, vacuum processing equipment and position correcting method
- Patent Title (中): 位置校正装置,真空处理设备和位置校正方法
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Application No.: US12003318Application Date: 2007-12-21
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Publication No.: US07918640B2Publication Date: 2011-04-05
- Inventor: Yoshinori Fujii
- Applicant: Yoshinori Fujii
- Applicant Address: JP Chigasaki-shi
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Chigasaki-shi
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2005-185488 20050624
- Main IPC: B65G47/24
- IPC: B65G47/24

Abstract:
A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.
Public/Granted literature
- US20080175693A1 Position correcting apparatus, vacuum processing equipment and position correcting method Public/Granted day:2008-07-24
Information query
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