Invention Grant
US07918712B2 Endpoint detection system for wafer polishing 有权
晶圆抛光端点检测系统

  • Patent Title: Endpoint detection system for wafer polishing
  • Patent Title (中): 晶圆抛光端点检测系统
  • Application No.: US12705091
    Application Date: 2010-02-12
  • Publication No.: US07918712B2
    Publication Date: 2011-04-05
  • Inventor: Stephan H. Wolf
  • Applicant: Stephan H. Wolf
  • Applicant Address: US CA San Luis Obispo
  • Assignee: Strasbaugh
  • Current Assignee: Strasbaugh
  • Current Assignee Address: US CA San Luis Obispo
  • Agency: Crockett & Crockett, PC
  • Agent Susan L. Crockett, Esq.
  • Main IPC: B24B49/12
  • IPC: B24B49/12
Endpoint detection system for wafer polishing
Abstract:
An wafer polishing pad assembly for use in CMP includes an optical sensor for sensing reflectivity of the wafer during polishing, and produces a corresponding signal, and transmits the signal from the rotating pad to a stationary portion of the assembly. The signal is transmitting off the pad through non-contact couplings such inductive coupling or optical couplings after being converted into signal formats enabling non-contact transmission.
Public/Granted literature
Information query
Patent Agency Ranking
0/0