Invention Grant
- Patent Title: Endpoint detection system for wafer polishing
- Patent Title (中): 晶圆抛光端点检测系统
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Application No.: US12705091Application Date: 2010-02-12
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Publication No.: US07918712B2Publication Date: 2011-04-05
- Inventor: Stephan H. Wolf
- Applicant: Stephan H. Wolf
- Applicant Address: US CA San Luis Obispo
- Assignee: Strasbaugh
- Current Assignee: Strasbaugh
- Current Assignee Address: US CA San Luis Obispo
- Agency: Crockett & Crockett, PC
- Agent Susan L. Crockett, Esq.
- Main IPC: B24B49/12
- IPC: B24B49/12

Abstract:
An wafer polishing pad assembly for use in CMP includes an optical sensor for sensing reflectivity of the wafer during polishing, and produces a corresponding signal, and transmits the signal from the rotating pad to a stationary portion of the assembly. The signal is transmitting off the pad through non-contact couplings such inductive coupling or optical couplings after being converted into signal formats enabling non-contact transmission.
Public/Granted literature
- US20100144244A1 ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING Public/Granted day:2010-06-10
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