Invention Grant
US07919143B2 Carrier for receiving an object and method for the production of a carrier
有权
用于接收用于生产载体的物体和方法的载体
- Patent Title: Carrier for receiving an object and method for the production of a carrier
- Patent Title (中): 用于接收用于生产载体的物体和方法的载体
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Application No.: US10581739Application Date: 2004-12-06
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Publication No.: US07919143B2Publication Date: 2011-04-05
- Inventor: Stefan Schneweis
- Applicant: Stefan Schneweis
- Applicant Address: DE Heuchelhein
- Assignee: Schunk Kohlensteofftechnik GmbH
- Current Assignee: Schunk Kohlensteofftechnik GmbH
- Current Assignee Address: DE Heuchelhein
- Agency: Dennison, Schultz & MacDonald
- Priority: DE10357698 20031209
- International Application: PCT/EP2004/013838 WO 20041206
- International Announcement: WO2005/059992 WO 20050630
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
A carrier for an object, preferably a substrate of a semiconductor component such as a wafer, includes a receiving element for the object and gas outlets arranged below the receiving element along the object received. At least sections of the carrier are made of a material which including stabilizing fibers and having a porosity which forms the gas outlets, in order to enable a desired gas to exit from the gas outlets in a dosed and finely distributed manner.
Public/Granted literature
- US20070110975A1 Carrier for receiving an object and method for the production of a carrier Public/Granted day:2007-05-17
Information query
IPC分类:
