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US07919188B2 Linked periodic networks of alternating carbon and inorganic clusters for use as low dielectric constant materials 有权
交替的碳和无机团簇的链接周期网络用作低介电常数材料

Linked periodic networks of alternating carbon and inorganic clusters for use as low dielectric constant materials
Abstract:
This disclosure relates generally to polymeric networks of fullerene compounds, to methods of preparing precursors for such networks, and to their subsequent use as low dielectric constant materials in microelectronic devices.
Abstract(Chinese):

本公开一般涉及富勒烯化合物的聚合物网络，制备用于这种网络的前体的方法，以及它们随后用作微电子器件中的低介电常数材料。

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