Invention Grant
- Patent Title: Photolithographic method and mask devices utilized for multiple exposures in the field of a feature
- Patent Title (中): 在特征领域中用于多次曝光的光刻方法和掩模装置
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Application No.: US11899383Application Date: 2007-09-04
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Publication No.: US07919231B2Publication Date: 2011-04-05
- Inventor: Mary Kathryn Gutberlet , Rambod Nader , Michael Andrew Parker , Douglas Johnson Werner
- Applicant: Mary Kathryn Gutberlet , Rambod Nader , Michael Andrew Parker , Douglas Johnson Werner
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Zilka-Kotab, PC
- Main IPC: G03C5/00
- IPC: G03C5/00 ; G03F1/00 ; G03F7/00

Abstract:
A photolithographic method for forming a plurality of characters on a device utilizes a mask set that includes a plurality of photolithographic masks, wherein each mask includes at least one non-opaque mask character field area that surrounds a non-opaque mask character area. Photoresist is exposed to radiation energy density through the set of masks using the masks sequentially to create at least one character field area of the photoresist, and a character area of the photoresist. Ultimately, because the character areas of the photoresist are exposed to some light energy density from the non-opaque mask character field areas during each mask exposure step, the total photoresist exposure time to create the series of characters is less than that of the prior art.
Public/Granted literature
- US20090081562A1 Photolithographic method and mask devices utilized for multiple exposures in the field of a feature Public/Granted day:2009-03-26
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