Invention Grant
- Patent Title: MRAM
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Application No.: US12493612Application Date: 2009-06-29
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Publication No.: US07919334B2Publication Date: 2011-04-05
- Inventor: Kor Seng Ang
- Applicant: Kor Seng Ang
- Applicant Address: SG Singapore
- Assignee: Showa Denko HD Singapore Pte Ltd.
- Current Assignee: Showa Denko HD Singapore Pte Ltd.
- Current Assignee Address: SG Singapore
- Agency: Sughrue Mion, PLLC
- Priority: SG200805077-5 20080701
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
Disclosed is a method to convert a low resistance cell in a MRAM device to a capacitive cell. The low resistance cell has a plurality of layers on a substrate. At least one layer remote from the substrate is sensitive to oxygen infusion. The method includes removing a cap layer of the cell and applying an oxygen barrier around the cell to expose at least a part of a surface of the at least one layer remote from the substrate. The at least one layer is oxidized. The oxygen barrier is removed.
Public/Granted literature
- US20100003834A1 MRAM Public/Granted day:2010-01-07
Information query
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