Invention Grant
US07919367B2 Method to increase charge retention of non-volatile memory manufactured in a single-gate logic process
有权
增加在单门逻辑过程中制造的非易失性存储器的电荷保留的方法
- Patent Title: Method to increase charge retention of non-volatile memory manufactured in a single-gate logic process
- Patent Title (中): 增加在单门逻辑过程中制造的非易失性存储器的电荷保留的方法
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Application No.: US12021229Application Date: 2008-01-28
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Publication No.: US07919367B2Publication Date: 2011-04-05
- Inventor: Gang-feng Fang , Dennis Sinitsky , Wingyu Leung
- Applicant: Gang-feng Fang , Dennis Sinitsky , Wingyu Leung
- Applicant Address: US CA Santa Clara
- Assignee: MoSys, Inc.
- Current Assignee: MoSys, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Bever, Hoffman & Harms, LLP
- Agent E. Eric Hoffman
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A non-volatile memory cell with increased charge retention is fabricated on the same substrate as logic devices using a single-gate conventional logic process. A silicide-blocking dielectric structure is formed over a floating gate of the NVM cell, thereby preventing silicide formation over the floating gate, while allowing silicide formation over the logic devices. Silicide spiking and bridging are prevented in the NVM cell, as silicide-blocking dielectric structure prevents silicide metal from coming in contact with the floating gate or adjacent sidewall spacers. The silicide-blocking dielectric layer may expose portions of the active regions of the NVM cell, away from the floating gate and adjacent sidewall spacers, thereby enabling silicide formation on these portions. Alternately, the silicide-blocking dielectric layer may cover the active regions of the NVM cell during silicide formation. In this case, silicide-blocking dielectric layer may be thinned or removed after silicide formation.
Public/Granted literature
- US20080138950A1 Method To Increase Charge Retention Of Non-Volatile Memory Manufactured In A Single-Gate Logic Process Public/Granted day:2008-06-12
Information query
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